中国芯片制造在国内光刻冠军的新EUV专利上取得进展 || Chinese chip making shows progress with new EUV patent from domestic lithography champion

上海微电子装备的专利仍在审查中，但在中国生产EUV工具将打破ASML的垄断。

via News - South China Morning Post (author: Che Pan)